FIBERPRO TM5300 Optical Wafer Thickness MicroGauge

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Part Number
TM5300
The Optical Wafer Thickness MicroGauge (TM5300) is an excellent product in the use of measuring the thickness, TTV, LTV, Warp and Bow of various Si Wafer, Sapphire wafer, Glass wafer, transparent, light-reflected materials.
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Features

  • Compact Design
  • Up to 12” Wafer Measurement
  • High Accuracy & Repeatability
  • No Calibration Needed
  • User Friendly Operation Program(LTV, 3D)
  • High Speed Measurement (500Hz for Warp / 1kHz for Thickness)
  • Thickness / Warp / Bow / LTV / TTV / Stress Measurement

Description

FIBERPRO’s released Optical Wafer Thickness MicroGauge (TM5300) is an excellent product in the use of measuring the thickness, TTV, LTV, Warp and Bow of various Si Wafer, Sapphire wafer, Glass wafer, transparent, light-reflected materials. It can be designed under On-line / Off-line measurement condition with motion stage controller in various applications. There’s no physical damage on the samples during measurement, and it can be protected from dust or pollutant by having a cover. Furthermore, with its compact and portable design, it is easy to move for measurement.

More Information
Manufacturer FIBERPRO
Product Series FIBERPRO TM5000 Optical Thickness Measurement System
Type Fiber Sensing Systems
Industry Aerospace and Defence, Fiber Optic Lasers, Optical Equipment Manufacturing (OEM), Photonics, Research
Applications Laser Systems
Standard Package Contains
Warranty Notes AusOptic Genuine Product Guarantee
Authorised distributor, benefit from manufacturer-backed, local warranty coverage, genuine parts, and our experienced local support team
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